5″ & 10″ PFA Filter Housings | Semiconductor Grade High-Purity | DANPORE

DANPORE offers 5-inch and 10-inch PFA filter housings, engineered for high-purity filtration of aggressive chemicals in semiconductor, electronic chemicals, and pharmaceutical applications. Our filter housings are constructed from high-purity PFA (perfluoroalkoxy) resin for all wetted components, delivering exceptional chemical resistance, ultra-low ionic extractables, and contamination-free performance meeting G4–G5 purity grades.

PFA is unaffected by virtually all chemicals used in semiconductor and pharmaceutical manufacturing. Our PFA filter housings feature all-fluoropolymer construction with no metal contact to process media, ensuring absolute purity even when filtering the most aggressive chemistries including strong acids (HF, HCl, H₂SO₄, HNO₃), strong bases (NH₄OH, TMAH), cleaning solutions (SC1, SC2, SPM), organic solvents, and CMP slurries. The smooth PFA inner surface prevents particle adhesion and minimizes pressure drop, while the stationary bowl design with secure closure ensures positive sealing and easy filter cartridge replacement.

Available in 5″ (127 mm) and 10″ (254 mm) lengths, our PFA filter housings are compatible with industry-standard 2-222/flat single-open-end filter cartridges from major manufacturers. The housings are manufactured, assembled, cleaned, and tested in Class 1000 cleanroom and Class 100 packaging workshop environments, ensuring the highest level of cleanliness throughout production. Various inlet/outlet connection options are available, including flare, NPT, and sanitary fittings, to suit diverse installation requirements in semiconductor fabs and pharmaceutical facilities.

These filter housings are ideal for semiconductor chemical delivery systems (CDS), point-of-use filtration, wet process chemical distribution, CMP slurry filtration, photoresist filtration, and ultrapure water systems where metal ion contamination must be avoided. The all-PFA construction leaches no detectable metals, meeting the strictest purity requirements for high-value process fluids.

Backed by ISO 9001 certification and over two decades of high-purity fluoropolymer processing expertise, DANPORE delivers consistent quality across our entire product portfolio.

Explore our complete PFA Lined Filter Housings range, including PFA Lined Valves and PFA Lined Fittings for total system integration. For semiconductor applications, our Semiconductor Grade PFA Lined Flanged Diaphragm Valves deliver reliable performance in chemical distribution systems. For hygienic applications, Tri-Clamp PFA Lined Valves & Fittings offer quick-coupling convenience. Additionally, High-Purity PFA Injection Molded Structural Components complete our total solution offering for custom applications.